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Chemistry of Atomic Layer Deposition

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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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Chemistry of Atomic Layer Deposition, Seán Thomas Barry

Lingua
Pubblicato
2021
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Metodi di pagamento

Titolo
Chemistry of Atomic Layer Deposition
Lingua
Inglese
Editore
De Gruyter
Pubblicato
2021
Formato
In brossura
Pagine
113
ISBN10
3110712512
ISBN13
9783110712513
Serie
Descrizione
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.