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Fundamentals of Microfabrication and Nanotechnology - 1: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology - Third Edition

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  • 656pagine
  • 23 ore di lettura

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Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.

Acquisto del libro

Fundamentals of Microfabrication and Nanotechnology - 1: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology - Third Edition, Marc J. Madou

Lingua
Pubblicato
2009
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(Copertina rigida),
Condizioni del libro
In buone condizioni
Prezzo
24,49 €

Metodi di pagamento

Titolo
Fundamentals of Microfabrication and Nanotechnology - 1: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology - Third Edition
Lingua
Inglese
Editore
CRC Press
Pubblicato
2009
Formato
Copertina rigida
Pagine
656
ISBN10
1420055119
ISBN13
9781420055115
Serie
Descrizione
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.