Scanning electron microscopy

Autori

• Ludwig Reimer

Parametri

• Fisica
• Scienze Naturali
• Springer series in optical sciences

Maggiori informazioni sul libro

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

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Lingua: Inglese

Pubblicato: 1998