Etching in microsystem technology

Autori

• Michael Köhler

Parametri

• Tecnologia e Ingegneria

Maggiori informazioni sul libro

Explaining the scientific fundamentals of etching processes which occupy a key position in microfabrication this work is a practical guide for etching processes. The practical section is set out like a cookery book: it gives recipes for many etching processes and helps to produce perfect microstructures.

Lingua: Inglese

Pubblicato: 1999