Il libro è attualmente esaurito
Maggiori informazioni sul libro
Focusing on the physics and materials science, this book delves into ion implantation and ion beam modification, crucial for silicon integrated circuit technology. It discusses the intricacies of ion-solid interactions, predicting ion ranges, and addressing lattice disorder. The text covers essential processes like shallow-junction formation and the innovative use of hydrogen ion beams for silicon slicing. Additionally, it explores topics such as ion-beam mixing, stresses, and sputtering, highlighting their significance in enhancing materials properties and performance.
Acquisto del libro
Ion Implantation and Synthesis of Materials, James W. Mayer, Michael Nastasi
- Lingua
- Pubblicato
- 2010
- product-detail.submit-box.info.binding
- (In brossura)
Ti avviseremo via email non appena lo rintracceremo.
Metodi di pagamento
Ancora nessuna valutazione.